LCP-25 Experimental Ellipsometer
Specifications
| Description | Specifications |
| Thickness Measurement Range | 1 nm ~ 300 nm |
| Range of Incident Angle | 30º ~ 90º , Error ≤ 0.1º |
| Polarizer & Analyzer Intersection Angle | 0º ~ 180º |
| Disk Angular Scale | 2º per scale |
| Min. Reading of Vernier | 0.05º |
| Optical Center Height | 152 mm |
| Work Stage Diameter | Φ 50 mm |
| Overall Dimensions | 730x230x290 mm |
| Weight | Approximately 20 kg |
Part List
| Description | Qty |
| Ellipsometer Unit | 1 |
| He-Ne Laser | 1 |
| Photoelectric Amplifier | 1 |
| Photo Cell | 1 |
| Silica Film on Silicon Substrate | 1 |
| Analysis Software CD | 1 |
| Instruction Manual | 1 |
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